Hitachi S-3400N Scanning Electron Microscope Room B21H, Trowbridge Hall
Resolution 3.0nm High Vacuum Mode 4.0nm Variable Pressure Mode Detectors SE BSE Chamber Accommodates 10 inch specimen Three high TOA ports for EDS, WEDS, EBSP, XRF, etc. Stage Fully eucentric, 5 axis computer controlled motorized stage Electron Gun Variable Quad Bian Circuitry with SE Accelerator Plate Automation Full automation including "no touch" objective aperture alignment Vacuum Turbo Molecular Pump (TMP)