Soft x-rays are used to probe the outer layers of the sample. Emitted photoeletrons are being analyzed by energy in the analyzer and plotted as a function of binding energy. Resulting spectrum is obtained from the sample layers within ~3 nm in depth thus giving great surface sensitivity.
Thin films and semiconductors
dd Surface segregation
dd Surface sensitive analysis
dd Parallel imaging of chemical state (Si vs SiO2)
Surface Oxides and Glasses
dd Layering (stratification)
dd Depth information
dd Polymers and Organics
dd Functional groups according to the chemical shift
dd Bonding information, presence of catalysts traces, etc.
Metals
dd Oxidation states
dd Metal oxide to metal layers
Catalysis
dd Characterization of surface components on catalyst
dd Characterizationof catalysis products and intermediates
Biological
dd Elemental information from thin layers (sections)
dd Presence of trace elements, mineral, etc.
Depth Profiling Using Focused Ion Bean
Non-destructive depth profiling using angle resolved XPS
Other applications include fast parallel elemental, Auger and secondary election imaging, Auger spectroscopy, UPS spectroscopy.
